Room temperature replication in spin on glass by nanoimprint technology

A compact nanoimprint lithography (NIL) system using the driving power of a stepping motor has been developed. Compared to a conventional NIL system with a hydraulic press, there are some additional features of the NIL system such as compactness and low cost. We propose the use of spin on glass (SOG) instead of PMMA to avoid thermal expansion and demonstrate SOG patterns with 200 nm linewidths at room temperature replications using the NIL system. The SOG patterns were transferred to gold metal using liftoff and to a silicon substrate by reactive ion etching. (C) 2001 American Vacuum Society.