320x256 solar-blind focal plane arrays based on AlxGa1-xN -: art. no. 011117

被引:78
作者
McClintock, R [1 ]
Mayes, K [1 ]
Yasan, A [1 ]
Shiell, D [1 ]
Kung, P [1 ]
Razeghi, M [1 ]
机构
[1] Northwestern Univ, Dept Elect & Comp Engn, Ctr Quantum Devices, Evanston, IL 60208 USA
关键词
D O I
10.1063/1.1846936
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report AlGaN-based backilluminated solar-blind ultraviolet focal plane arrays operating at a wavelength of 280 nm. The electrical characteristics of the individual pixels are discussed, and the uniformity of the array is presented. The p-i-n photodiode array was hybridized to a 320x256 read-out integrated circuit entirely within our university research lab, and a working 320x256 camera was demonstrated. Several example solar-blind images from the camera are also provided. (C) 2005 American Institute of Physics.
引用
收藏
页码:011117 / 1
页数:3
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