A level set method for thin film epitaxial growth

被引:70
作者
Chen, S [1 ]
Merriman, B
Kang, M
Caflisch, RE
Ratsch, C
Cheng, LT
Gyure, M
Fedkiw, RP
Anderson, C
Osher, S
机构
[1] Univ Calif Los Angeles, Dept Math, Los Angeles, CA 90095 USA
[2] HRL Labs, Malibu, CA 90265 USA
[3] Stanford Univ, Dept Comp Sci, Stanford, CA 94305 USA
关键词
D O I
10.1006/jcph.2000.6689
中图分类号
TP39 [计算机的应用];
学科分类号
081203 ; 0835 ;
摘要
We present a level set based numerical algorithm for simulating a model of epitaxial growth. The island dynamics model is a continuum model for the growth of thin films. In this paper, we emphasize the details of the numerical method used to simulate the island dynamics model. (C) 2001 Academic Press.
引用
收藏
页码:475 / 500
页数:26
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