Inelastic interactions of slow ions and atoms with surfaces

被引:19
作者
Aumayr, F [1 ]
Winter, HP [1 ]
机构
[1] Vienna Univ Technol, Inst Allgemeine Phys, A-1040 Vienna, Austria
关键词
multiply charged ions; interactions with surfaces; potential electron emission; kinetic electron emission; potential sputtering; electronic stopping; nanodefect production;
D O I
10.1016/j.nimb.2005.03.093
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Interaction of slow atoms, singly- or multiply charged ions with a solid surface pumps - via nuclear and electronic stopping processes - part of the projectile energy into the target system. In this way ejection of slow electrons and target particles (sputtering) can be initiated. We discuss the relevant stopping processes and their interrelation with the projectile charge. Recently developed coincidence techniques are used for detailed studies of slow particle induced kinetic (KE) and potential electron emission (PE) from the selvage of mono-crystalline metal and insulator surfaces. We also present a model study on target-structure dependent KE from highly-oriented pyrolythic graphite (HOPG), and shortly review slow multicharged ion induced desorption from insulator surfaces (potential sputtering - PS). (c) 2005 Published by Elsevier B.V.
引用
收藏
页码:111 / 124
页数:14
相关论文
共 79 条
[1]  
Arnau A, 1997, SURF SCI REP, V27, P117
[2]   Electronic sputtering of thin SiO2 films by MeV heavy ions [J].
Arnoldbik, WM ;
Tomozeiu, N ;
Habraken, FHPM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 203 :151-157
[3]   ON THE MEASUREMENT OF STATISTICS FOR PARTICLE-INDUCED ELECTRON-EMISSION FROM A CLEAN METAL-SURFACE [J].
AUMAYR, F ;
LAKITS, G ;
WINTER, H .
APPLIED SURFACE SCIENCE, 1991, 47 (02) :139-147
[4]   Potential sputtering [J].
Aumayr, F ;
Winter, H .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2004, 362 (1814) :77-102
[5]  
AUMAYR F, 1999, COMMENTS AT MOL PHYS, V34, P201
[6]  
BARAGIOLA R, 1993, LOW ENERGY ION SURFA, pCH4
[7]   Plasmon-assisted electron emission from Al and Mg surfaces by slow ions [J].
Baragiola, RA ;
Dukes, CA .
PHYSICAL REVIEW LETTERS, 1996, 76 (14) :2547-2550
[8]   ELECTRON-EMISSION FROM CLEAN METAL-SURFACES INDUCED BY LOW-ENERGY LIGHT-IONS [J].
BARAGIOLA, RA ;
ALONSO, EV ;
FLORIO, AO .
PHYSICAL REVIEW B, 1979, 19 (01) :121-129
[9]  
Bitenskii I. S., 1979, Soviet Physics - Technical Physics, V24, P618
[10]   THE SPUTTERING OF NON-METALS UNDER SLOW MULTIPLY CHARGED IONS [J].
BITENSKY, IS ;
PARILIS, ES .
JOURNAL DE PHYSIQUE, 1989, 50 (C-2) :227-230