Field emission properties of diamondlike carbon films made by a novel laser evaporation technique

被引:18
作者
Choi, JO [1 ]
Huh, JW [1 ]
Choi, YH [1 ]
Kim, MJ [1 ]
Kim, H [1 ]
Cho, YR [1 ]
Jeong, HS [1 ]
机构
[1] Inst Adv Engn, Elect Mat Lab, Kyonggi Do 449020, South Korea
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 03期
关键词
D O I
10.1116/1.589982
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Field emission properties of nonhydrogenated diamondlike carbon (DLC) films prepared by a novel laser evaporation technique have been investigated. A key feature of the novel technique is using a scanning pulsed laser beam that irradiates a graphite target with a focused beam and constant laser power density. The technique has the main advantage of easy scale-up for uniform and large area coating. The results show that the DLC films exhibit an electron emission threshold field as low as 10 V/mu m and a current density of 100 mA/cm(2) at 40 V/mu m. Additionally, a bright image of cathodoluminescence has been obtained successfully from a fully frit-sealed diode-structured field emission display using the DLC film emitters. (C) 1998 American Vacuum Society.
引用
收藏
页码:1199 / 1202
页数:4
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