Microstructure and adhesion characteristics of diamond-like carbon films deposited on steel substrates

被引：63

作者：

Chang, CL ^{[1
]}

Wang, DY ^{[1
]}

机构：

[1] Natl Chung Hsing Univ, Inst Mat Engn, Taichung, Taiwan

来源：

关键词：

diamond-like carbon; adhesion; Raman; wear;

D O I：

10.1016/S0925-9635(01)00382-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

For tribological applications, the low friction coefficient and high microhardness of diamond-like carbon (DLC) films give significant advantages in cutting and forming non-ferrous materials. The inherently large residual stress of DLC films, however, prevents the depositing of thicker films. This study designed and implemented a compound interface, comprising a series of metal, metal nitride, and metal carbonitride interlayers deposited in a graded structure, between the DLC (a metal-doped a-C:H) film and M2 steel substrates. The tribological performance of the interface was evaluated using a scratch tester and ball-on-disk tribometer. Meanwhile, the failure mechanism of DLC deposited on M2 steel substrates was examined using SEM/EDS and TEM microscopy. Experimental results demonstrate an improved DLC hard coating with superior adhesion strength on the steel substrates. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：1528 / 1534

页数：7

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