Integrated silicon microspectrometers

被引：24

作者：

Kong, SH ^{[1
]}

Correia, JH

de Graaf, G

Bartek, M

Wolffenbuttel, RF

机构：

[1] Delft Univ, Delft, Netherlands

[2] Univ Minho, Dept Ind Elect, P-4719 Braga, Portugal

[3] Delft Univ Technol, Elect Components Mat & Technol Lab, NL-2600 AA Delft, Netherlands

[4] Delft Univ Technol, Lab Elect Instrumentat, NL-2600 AA Delft, Netherlands

来源：

IEEE INSTRUMENTATION & MEASUREMENT MAGAZINE | 2001年 / 4卷 / 03期

关键词：

D O I：

10.1109/5289.953457

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microspectrometers have been fabricated using standard microelectronic processing, with additional compatible post-processing steps, for either a grating or a Fabry-Perot resonator which is used as dispersion element. The spectral resolution ranges between 20 and 50 channels in the selected operating range. Combining a standard microelectronic process with additional microelectromechanical systems (MEMS) processing for optical components results in small and low-cost solutions for many industrial and consumer applications.

引用

收藏

页码：34 / 38

页数：5

相关论文

共 13 条

[1] SURFACE MICROMACHINED TUNABLE INTERFEROMETER ARRAY [J].

ARATANI, K ;

FRENCH, PJ ;

SARRO, PM ;

POENAR, D ;

WOLFFENBUTTEL, RF ;

MIDDELHOEK, S .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :17-23

[2] Bulk-micromachined tunable Fabry-Perot microinterferometer for the visible spectral range [J].

Correia, JH ;

Bartek, M ;

Wolffenbuttel, RF .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 76 (1-3) :191-196

[3] Single-chip CMOS optical microspectrometer [J].

Correia, JH ;

de Graaf, G ;

Kong, SH ;

Bartek, M ;

Wolffenbuttel, RF .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) :191-197

[4] High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum [J].

Correia, JH ;

Bartek, M ;

Wolffenbuttel, RF .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (03) :553-559

[5] MINIATURIZED SPECTROMETER EMPLOYING PLANAR WAVE-GUIDES AND GRATING COUPLERS FOR CHEMICAL-ANALYSIS [J].

GOLDMAN, DS ;

WHITE, PL ;

ANHEIER, NC .

APPLIED OPTICS, 1990, 29 (31) :4583-4589

[6] A MINIATURE FABRY-PEROT-INTERFEROMETER WITH A CORRUGATED SILICON DIAPHRAGM SUPPORT [J].

JERMAN, JH ;

CLIFT, DJ ;

MALLINSON, SR .

SENSORS AND ACTUATORS A-PHYSICAL, 1991, 29 (02) :151-158

[7]

KONG SH, 2000, P EUROSENSORS COPENH, V14, P321

[8] ANISOTROPICALLY ETCHED SILICON MIRRORS FOR OPTICAL SENSOR APPLICATIONS [J].

KWA, TA ;

FRENCH, PJ ;

WOLFFENBUTTEL, RF ;

SARRO, PM ;

HELLEMANS, L ;

SNAUWAERT, J .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (04) :1226-1233

[9] INTEGRATED GRATING DETECTOR ARRAY FABRICATED IN SILICON USING MICROMACHINING TECHNIQUES [J].

KWA, TA ;

WOLFFENBUTTEL, RF .

SENSORS AND ACTUATORS A-PHYSICAL, 1992, 31 (1-3) :259-266

[10] Backside-illuminated silicon photodiode array for an integrated spectrometer [J].

Kwa, TA ;

Sarro, PM ;

Wolffenbuttel, RF .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1997, 44 (05) :761-765