Hydrogen depth-profiling in chemical-vapor-deposited diamond films by high-resolution elastic recoil detection

被引：43

作者：

Kimura, K ^{[1
]}

Nakajima, K

Yamanaka, S

Hasegawa, M

Okushi, H

机构：

[1] Kyoto Univ, Dept Engn Phys & Mech, Kyoto 6068501, Japan

[2] Electrotech Lab, Tsukuba, Ibaraki 3058568, Japan

来源：

APPLIED PHYSICS LETTERS | 2001年 / 78卷 / 12期

关键词：

D O I：

10.1063/1.1356452

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have measured the hydrogen depth profiles in chemical-vapor-deposited diamond films by elastic recoil detection. Depth resolution of similar to0.23 nm is achieved using a high-resolution magnetic spectrometer. The hydrogen depth profile shows a sharp peak at surface, and the hydrogen coverage is estimated to be 1 +/-0.3 ML, indicating formation of the monohydride structure. The surface peak has a small tail toward deeper region, which is ascribed to hydrogen atoms incorporated in a subsurface region. These subsurface hydrogen atoms might be the origin of the surface conductivity. (C) 2001 American Institute of Physics.

引用

页码：1679 / 1681

页数：3

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