Structural, optical and electrical properties of In doped CdO thin films for optoelectronic applications

被引：101

作者：

Gupta, R. K. ^{[1
]}

Ghosh, K. ^{[1
]}

Patel, R. ^{[2
]}

Mishra, S. R. ^{[3
]}

Kahol, P. K. ^{[1
]}

机构：

[1] SW Missouri State Univ, Dept Phys Astron & Mat Sci, Springfield, MO 65897 USA

[2] SW Missouri State Univ, Roy Blunt Jordan Valley Innovat Ctr, Springfield, MO 65806 USA

[3] Univ Memphis, Dept Phys, Memphis, TN 38152 USA

来源：

MATERIALS LETTERS | 2008年 / 62卷 / 19期

关键词：

semiconductor; electrical properties; thin films; cadmium oxide; optical materials and properties;

D O I：

10.1016/j.matlet.2008.03.015

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of indium doped cadmium oxide were deposited on quartz substrate using pulsed laser deposition technique. The effect of growth temperature and partial oxygen pressure on structural, optical and electrical properties was studied. We find that the optical transparency of the films largely depends on the growth temperature, while partial oxygen pressure has virtually no effect on the transparency of the films. Electrical properties are found to be sensitive to both the growth temperature and oxygen pressure. It is observed that conductivity and carrier concentration decreases with temperature. The film grown at 200 degrees C under an oxygen pressure of 5.0 x 10(-4) mbar shows high mobility (155 cm(2)/V s), high carrier concentration (1.41 x 10(21) cm(3)), and low resistivity (2.86 x 10(-5) Omega cm). (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：3373 / 3375

页数：3

共 19 条

[1] Structural, optical and electrical properties of chemically sprayed CdO thin films [J].

Bhosale, CH ;

Kambale, AV ;

Kokate, AV ;

Rajpure, KY .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 122 (01) :67-71

[2] High transmittance CdO thin films obtained by the sol-gel method [J].

Carballeda-Galicia, DM ;

Castanedo-Pérez, R ;

Jiménez-Sandoval, O ;

Jiménez-Sandoval, S ;

Torres-Delgado, G ;

Zúñiga-Romero, CI .

THIN SOLID FILMS, 2000, 371 (1-2) :105-108

[3]

CHU TL, 1963, J ELECTROCHEM SOC, V110, P548

[4] Opto-electrical properties of Ti-doped In2O3 thin films grown by pulsed laser deposition [J].

Gupta, R. K. ;

Ghosh, K. ;

Mishra, S. R. ;

Kahol, P. K. .

APPLIED SURFACE SCIENCE, 2007, 253 (24) :9422-9425

[5] Infrared study of SiO2/TiO2/CdO layers on glass prepared by the sol-gel method [J].

Hobert, H ;

Seltmann, B .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1996, 195 (1-2) :54-63

[6] Electrical and optical properties of amorphous indium zinc oxide films [J].

Ito, N ;

Sato, Y ;

Song, PK ;

Kaijio, A ;

Inoue, K ;

Shigesato, Y .

THIN SOLID FILMS, 2006, 496 (01) :99-103

[7] Dependence of the sheet resistance of indium-tin-oxide thin films on grain size and grain orientation determined from X-ray diffraction techniques [J].

Kulkarni, AK ;

Schulz, KH ;

Lim, TS ;

Khan, M .

THIN SOLID FILMS, 1999, 345 (02) :273-277

[8] Top-emitting organic light-emitting diode using transparent conducting indium oxide layer fabricated by a two-step ion beam-assisted deposition [J].

Lim, J. T. ;

Jeong, C. H. ;

Vozny, A. ;

Lee, J. H. ;

Kim, M. S. ;

Yeom, G. Y. .

SURFACE & COATINGS TECHNOLOGY, 2007, 201 (9-11) :5358-5362

[9] Properties of multilayer transparent conducting oxide films [J].

Martin, EJJ ;

Yan, M ;

Lane, M ;

Ireland, J ;

Kannewurf, CR ;

Chang, RPH .

THIN SOLID FILMS, 2004, 461 (02) :309-315

[10]

Pauw L., 1958, Philips Res. Repts, V13, P1, DOI 10.1142/9789814503464_0017

← 1 2 →