Chemical composition and charge stability of highly crystalline pulsed-laser-deposited polytetrafluoroethylene films on metal substrates

被引：17

作者：

Huber, N

Heitz, J ^{[1
]}

Bäuerle, D

Schwödiauer, R

Bauer, S

Niino, H

Yabe, A

机构：

[1] Johannes Kepler Univ, A-4040 Linz, Austria

[2] NIMC, Tsukuba, Ibaraki 305, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2001年 / 72卷 / 05期

关键词：

D O I：

10.1007/s003390100825

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

KrF excimer-laser ablation of sintered-powder polytetrafluoroethylene (PTFE) targets is used for the deposition of high-quality PTFE films on metallic microstructures and metal backplates for electroacoustic applications. The films are found to be highly crystalline, consisting of large spherulites with diameters up to 1 mm. X-ray photoelectron spectroscopy of the films revealed the chemical similarity of press-sinter target pulsed-laser-deposited films with bulk PTFE. Negatively charged PTFE films on stainless steel backplates exhibit an exceptional charge stability with practically no decrease of the surface potential up to 225 degreesC in open-circuit thermally stimulated discharge.

引用

页码：581 / 585

页数：5

共 22 条

[1] Electret membranes and backelectrodes for application in micromechanical transducers [J].