Single-pulse ultraviolet laser-induced surface modification and ablation of polyimide

被引：40

作者：

Piglmayer, K ^{[1
]}

Arenholz, E ^{[1
]}

Ortwein, C ^{[1
]}

Arnold, N ^{[1
]}

Bauerle, D ^{[1
]}

机构：

[1] Johannes Kepler Univ Linz, A-4040 Linz, Austria

来源：

APPLIED PHYSICS LETTERS | 1998年 / 73卷 / 06期

关键词：

D O I：

10.1063/1.122021

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Single-pulse laser ablation of polyimide was investigated by using focused UV-Ar+-laser radiation (lambda approximate to 302 nm, 140 ns less than or equal to tau(l) less than or equal to 50 ms) and atomic force microscopy. The results clearly demonstrate that the ablation rates do not depend on the total dose only, but depend as well on the duration of the laser pulses, tau(l). The experimental results can be interpreted almost quantitatively on the basis of a purely thermal model. (C) 1998 American Institute of Physics.

引用

页码：847 / 849

页数：3

共 18 条

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].