Identification and characterization of a novel silicon hydride species on the Si(100) surface

In this Letter we describe the existence of a novel silicon hydride species on the Si(100) surface. We demonstrate that this species contains hydrogen in a non-monohydride form and that the number of these species is dependent on the surface preparation. Remarkably, these species are still present on the surface under conditions where hydrogen diffusion occurs and even after the monohydride phase begins to decompose. The possible role of these species in the chemistry of hydrogen on the Si(100) surface is discussed. (C) 1999 Elsevier Science B.V. All rights reserved.