A 1 GHz integrated circuit with carbon nanotube interconnects and silicon transistors

被引:147
作者
Close, Gael F. [1 ]
Yasuda, Shinichi [2 ]
Paul, Bipul [3 ]
Fujita, Shinobu [2 ]
Wong, H. -S. Philip [1 ]
机构
[1] Stanford Univ, Dept Elect Engn, Stanford, CA 94025 USA
[2] Toshiba Co Ltd, Adv LSI Technol Lab, Kawasaki, Kanagawa 210, Japan
[3] Toshiba Amer Res, San Jose, CA USA
关键词
D O I
10.1021/nl0730965
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Due to their excellent electrical properties, metallic carbon nanotubes are promising materials for interconnect wires in future integrated circuits. Simulations have shown that the use of metallic carbon nanotube interconnects could yield more energy efficient and faster integrated circuits. The next step is to build an experimental prototype integrated circuit using carbon nanotube interconnects operating at high speed. Here, we report the fabrication of the first stand-alone integrated circuit combining silicon transistors and individual carbon nanotube interconnect wires on the same chip operating above 1 GHz. In addition to setting a milestone by operating above 1 GHz, this prototype is also a tool to investigate carbon nanotubes on a silicon-based platform at high frequencies, paving the way for future multi-GHz nanoelectronics.
引用
收藏
页码:706 / 709
页数:4
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