Reliability methodology for prediction of micromachined accelerometer stiction

被引：32

作者：

Hartzell, A ^{[1
]}

Woodilla, D ^{[1
]}

机构：

[1] Analog Devices Inc, Micromachined Prod Div, Cambridge, MA USA

来源：

1999 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 37TH ANNUAL | 1999年

关键词：

D O I：

10.1109/RELPHY.1999.761613

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

The accurate prediction of known failure mechanisms is required for success in today's integrated circuit marketplace. This study reports an empirically-generated stiction field prediction model methodology for accelerometers prone to stiction failure. A probability distribution function was generated as a function of shock level in g's. Although the population was all very stiction prone, the failure mode is probabilistic and parts have a high survival rate.

引用

页码：202 / 205

页数：4

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