Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry

被引：103

作者：

Franquet, A

De Laet, J

Schram, T

Terryn, H

Subramanian, V

van Ooij, WJ

Vereecken, J

机构：

[1] Free Univ Brussels, Dept Met Electrochem & Mat Sci, B-1050 Brussels, Belgium

[2] Univ Cincinnati, Dept Mat Sci & Engn, Cincinnati, OH 45221 USA

来源：

THIN SOLID FILMS | 2001年 / 384卷 / 01期

关键词：

silane; thickness; spectroscopic ellipsometry; aluminium;

D O I：

10.1016/S0040-6090(00)01805-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The thickness of thin films of non-functional silane bis-1,2-(triethoxysilyl)ethane (H5C2O)(3)Si-CH2CH2-Si(OC2H5)(3) (BTSE) deposited on aluminium surfaces is investigated using spectroscopic ellipsometry (250-1700 nm). The data processing of the ellipsometry spectra is carried out by means of simulation and regression techniques. New advances in data processing, e.g. multiple sample analysis and determination of thickness non-uniformity, are applied to characterise these thin polymer films realistically. The influence of the concentration of the BTSE solution and the curing of the film is investigated. Optical thickness estimates are corroborated by independent auger electron spectroscopy and transmission electron microscopy analysis. (C) 2001 Published by Elsevier Science B.V. All rights reserved.

引用

页码：37 / 45

页数：9

共 28 条

[1] OPTICAL-PROPERTIES OF THIN-FILMS [J].