SPECTROSCOPIC ELLIPSOMETRY CHARACTERIZATION OF ANODIC FILMS ON ALUMINUM CORRELATED WITH TRANSMISSION ELECTRON-MICROSCOPY AND AUGER-ELECTRON SPECTROSCOPY

被引：28

作者：

DELAET, J ^{[1
]}

TERRYN, H ^{[1
]}

VEREECKEN, J ^{[1
]}

VANHELLEMONT, J ^{[1
]}

机构：

[1] INTER UNIV,CTR MICROELECTR,B-3001 LOUVAIN,BELGIUM

来源：

SURFACE AND INTERFACE ANALYSIS | 1992年 / 19卷 / 1-12期

关键词：

D O I：

10.1002/sia.740190183

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

This paper reports the characterization of barrier-type anodic oxide films on aluminium by means of spectroscopic ellipsometry. In order to show the capabilities of the technique for quantitative determination of the layer characteristics such as thickness, composition and interface structure, results based on ellipsometric data are correlated with results from transmission electron microscopy and Auger electron spectroscopy. Especially if measures are performed at multiple angles of incidence, ellipsometry allows an accurate determination of the thickness and the interfacial properties of the barrier layer.

引用

页码：445 / 449

页数：5

共 18 条

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