Mechanical properties of ZrCuTi thin film metallic glass with high content of immiscible tantalum

被引:49
作者
Chou, H. S. [1 ]
Huang, J. C. [1 ]
Chang, L. W. [1 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Mat & Optoelect Sci, Ctr Nanosci & Nanotechnol, Kaohsiung 804, Taiwan
关键词
Thin films metallic glasses; Immiscible; Nanoindentation; TI; NANOINDENTATION; COMPRESSION; PLASTICITY; BEHAVIOR; ALLOYS; TA;
D O I
10.1016/j.surfcoat.2010.07.042
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The ZrCuTi thin film metallic glasses (TFMGs) with immiscible Ta were successfully fabricated via co-sputtering The glass forming composition for ZrCuTI-Ta TFMGs ranges from 0 to similar to 75 at.% of immiscible Ta, distinctly different from bulk metallic glasses (BMGs). When Ta content is over 75 at.%, the amorphous TFMG structure gradually transforms to nanocrystalline beta-Ta. The mechanical properties are strongly influenced by Ta content. The elastic modulus remains nearly constant over 0-50 at.% Ta, and increase rapidly over 50-100% Ta The key factor appears to be the population of the Ta-Ta strong bonds The highest elastic modulus and hardness up to -140 GPa and 10 GPa. respectively, of the Ta-rich TFMGs, much higher than the Zr-, Cuand Ti-based amorphous alloys, might be useful for applications. (C) 2010 Elsevier B V. All rights reserved.
引用
收藏
页码:587 / 590
页数:4
相关论文
共 24 条
[1]  
ALPER AM, 1970, PHASE DIAGRAM MAT SC
[2]   The microstructure and electrical transport properties of immiscible copper-niobium alloy thin films [J].
Banerjee, Rajarshi ;
Bose, Sangita ;
Genc, Arda ;
Ayyub, Pushan .
JOURNAL OF APPLIED PHYSICS, 2008, 103 (03)
[3]  
BOER FR, 1988, COHESION METALS
[4]   Compression behavior of Mg-Cu-Gd bulk metallic glasses with various specimen height to diameter ratios [J].
Chen, H. M. ;
Chang, Y. C. ;
Hung, T. H. ;
Du, X. H. ;
Huang, J. C. ;
Jang, J. S. C. ;
Liaw, P. K. .
MATERIALS TRANSACTIONS, 2007, 48 (07) :1802-1805
[5]   Bulk metallic glasses in the Zr-Al-Ni-Cu system [J].
Chen, W ;
Wang, Y ;
Qiang, J ;
Dong, C .
ACTA MATERIALIA, 2003, 51 (07) :1899-1907
[6]   Structural relaxation and nanoindentation response in Zr-Cu-Ti amorphous thin films [J].
Chou, H. S. ;
Huang, J. C. ;
Chang, L. W. ;
Nieh, T. G. .
APPLIED PHYSICS LETTERS, 2008, 93 (19)
[7]   Two-glassy-phase bulk metallic glass with remarkable plasticity [J].
Du, X. H. ;
Huang, J. C. ;
Hsieh, K. C. ;
Lai, Y. H. ;
Chen, H. M. ;
Jang, J. S. C. ;
Liaw, P. K. .
APPLIED PHYSICS LETTERS, 2007, 91 (13)
[8]   ATOMIC SIZE EFFECT ON THE FORMABILITY OF METALLIC GLASSES [J].
EGAMI, T ;
WASEDA, Y .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 64 (1-2) :113-134
[9]   Nanomechanical properties of copper thin films on different substrates using the nanoindentation technique [J].
Fang, TH ;
Chang, WJ .
MICROELECTRONIC ENGINEERING, 2003, 65 (1-2) :231-238
[10]   Stability, phase transformation and deformation behavior of Ti-base metallic glass and composites [J].
He, G ;
Eckert, J ;
Löser, W .
ACTA MATERIALIA, 2003, 51 (06) :1621-1631