Three-dimensional Schwoebel-Ehrlich barrier

被引:19
作者
Liu, SJ
Wang, EG
Woo, CH
Huang, HC [1 ]
机构
[1] Hong Kong Polytech Univ, Dept Mech Engn, Hong Kong, Hong Kong, Peoples R China
[2] Chinese Acad Sci, Inst Phys, Beijing 100080, Peoples R China
来源
JOURNAL OF COMPUTER-AIDED MATERIALS DESIGN | 2000年 / 7卷 / 03期
关键词
faceting; Schwoebel-Ehrlich barrier; surfactant; texture competition;
D O I
10.1023/A:1011832828818
中图分类号
TP39 [计算机的应用];
学科分类号
081203 ; 0835 ;
摘要
It is well known that the Schwoebel-Ehrlich barrier affects, and even dictates, surface microstructure evolution - such as the transition of growth modes from layer-by-layer to island growth. The conventional Schwoebel-Ehrlich barrier refers to the case when an adatom diffuses down an island of one monolayer. During thin film deposition. an adatom often needs to diffuse down an island of multiple layers. For the latter, we demonstrate and calculate the cot-responding Schwoebel-Ehrlich barrier - which we call three-dimensional Schwoebel-Ehrlich barrier. Our calculations show that the three-dimensional Schwoebel-Ehrlich barrier can be large even if its conventional Counterpart is small - as in aluminum. We further propose and demonstrate a possible process of engineering surface faceting and film texture, by modifying the three-dimensional Schwoebel-Ehrlich barrier.
引用
收藏
页码:195 / 201
页数:7
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