Control of liquid bridging induced stiction of micromechanical structures

被引：22

作者：

Abe, T ^{[1
]}

Reed, ML ^{[1
]}

机构：

[1] CARNEGIE MELLON UNIV, DEPT ELECT & COMP ENGN, INTEGRATED MICROSYST LAB, PITTSBURGH, PA 15213 USA

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1996年 / 6卷 / 02期

关键词：

D O I：

10.1088/0960-1317/6/2/002

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Stiction, the unwanted adhesion of micromachined components to the underlying substrate, is a vexing problem encountered during the fabrication of microelectromechanical systems. Liquid bridging of rinse liquids after release etch processing introduces significant surface tension forces which can initiate stiction. We show that liquid bridging can be substantially eliminated by appropriate design of the microstructure periphery. Antistiction tabs located at the center of doubly clamped beams, or at the ends of cantilevered beams, are shown to improve release yield significantly in both surface and bulk micromachining processes.

引用

页码：213 / 216

页数：4

共 19 条

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