Growth of InN by chloride-transport vapor phase epitaxy

被引：12

作者：

Sunakawa, H ^{[1
]}

Yamaguchi, AA ^{[1
]}

Kimura, A ^{[1
]}

Usui, A ^{[1
]}

机构：

[1] NEC CORP LTD, OPTOELECT RES LABS, TSUKUBA, IBARAKI 305, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1996年 / 35卷 / 11A期

关键词：

InN; GaAs; GaN; vapor phase epitaxy; indium chloride; X-ray diffraction; hexagonal;

D O I：

10.1143/JJAP.35.L1395

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Hexagonal single crystalline InN film are grown on a hexagonal-GaN epitaxial layer in a GaAs(100) substrates by chloride-transport vapor phase epitaxy. It is found that lower temperatures for the upstream region of the reator, where indium chloride is generated, are crucial for InN growth. In addition, the use of inert gas such as nitrogen, is necessary for growth. Based on these results, the necessity of InCl3 as a source material is emphasized for InN growth. The grown film reveals a hexagonal structure whose c-axis orients to the GaAs[111]B direction.

引用

页码：L1395 / L1397

页数：3

共 9 条

[1] PREPARATION AND PROPERTIES OF III-V NITRIDE THIN-FILMS [J].

KUBOTA, K ;

KOBAYASHI, Y ;

FUJIMOTO, K .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (07) :2984-2988

[2]

Marasina L. A., 1977, Kristall und Technik, V12, P541, DOI 10.1002/crat.19770120603

[3] HERSTELLUNG DER NITRIDE VON BOR, ALUMINIUM, GALLIUM UND INDIUM NACH DEM AUFWACHSVERFAHREN [J].

RENNER, T .

ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1959, 298 (1-2) :22-33

[4] INFLUENCE OF GROWTH-RATES ON PROPERTIES OF INN THIN-FILMS [J].

SATO, Y ;

SATO, S .

JOURNAL OF CRYSTAL GROWTH, 1995, 146 (1-4) :262-265

[5]

TASLEY TL, 1986, J APPL PHYS, V59, P3241

[6] ATOMIC LAYER EPITAXY OF III-V COMPOUNDS - CHEMISTRY AND APPLICATIONS [J].

USUI, A .

PROCEEDINGS OF THE IEEE, 1992, 80 (10) :1641-1653

[7]

USUI A, 1995, ADV PROGR 14 EL MAT, P43

[8] HETEROEPITAXIAL GROWTH OF INN BY MICROWAVE-EXCITED METALORGANIC VAPOR-PHASE EPITAXY [J].

WAKAHARA, A ;

YOSHIDA, A .

APPLIED PHYSICS LETTERS, 1989, 54 (08) :709-711

[9]

YAMAGUCHI AA, 1996, P INT S BLUE LAS LIG, P206

← 1 →