Nanoscale oxide patterning with electron-solid-gas reactions

被引：11

作者：

Crozier, Peter A. ^{[1
]}

机构：

[1] Arizona State Univ, Sch Mat, Leroy Eyring Ctr Solid State Sci, Tempe, AZ 85287 USA

来源：

NANO LETTERS | 2007年 / 7卷 / 08期

关键词：

D O I：

10.1021/nl071044+

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A novel nanoscale oxide patterning technique based on electron beam induced transformation in a gas environment is demonstrated. Localized phase transformation is induced in the surface region of a substrate, resulting in the formation of an oxide pattern that is embedded in the surface. The composition of the transformed region is determined only by the substrate and gas composition. The spatial resolution of the technique is about 15 nm.

引用

页码：2395 / 2398

页数：4

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