Preparation of strontium titanate thin films by the hydrothermal-electrochemical method in a solution flow system

SrTiO3 thin films have been prepared on titanium substrates using strontium acetate solutions in newly constructed Bow-system equipment by the hydrothermal-electrochemical method. The synthesis parameters (temperature of 120 degrees-200 degrees C and Bow rate of 1-40 mL/min) allow fabrication of dense, single-phase films with grain sizes in the range of 80-340 nm by controlling nucleation and/or growth rates. The Bow can be closed, enabling easy recycling of the solutions used. This processing route may serve as an inexpensive and environmentally friendly way of fabrication of single-phase SrTiO3 thin films as well as functionally graded ferroelectric materials.