Growth of three-dimensional nano-structures using FIB-CVD and its mechanical properties

This paper reviewed recent results on three-dimensional nano-structures fabrication techniques using focused-ion-beam induced chemical vapor deposition (FIB-CVD). Precise control of beam scanning and the source-gas pressure enabled the lateral growth of amorphous carbon, and we demonstrated real three-dimensional growth of amorphous carbon objects such as wineglasses, coils and micro-crowns. The major advantage of such amorphous carbon objects are their high Young's modulus exceeding 600 GPa. The Young's modulus depended sensitively on the growth rate, where slower growth rate resulted in higher stiffness. (C) 2003 Elsevier Science B.V. All rights reserved.