共 10 条
[2]
High etching rate of GaN films by KrF excimer laser
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
2001, 82 (1-3)
:42-44
[6]
Kneissl M, 2001, PHYS STATUS SOLIDI A, V188, P23, DOI 10.1002/1521-396X(200111)188:1<23::AID-PSSA23>3.0.CO
[7]
2-F
[8]
Nakamura S., 1997, BLUE LASER DIODE GAN