Plasma sputtering system for deposition of thin film combinatorial libraries

被引：17

作者：

Cooper, JS

Zhang, GH

McGinn, PJ ^{[1
]}

机构：

[1] Univ Notre Dame, Dept Chem & Biomol Engn, Notre Dame, IN 46556 USA

[2] Univ Notre Dame, Ctr Molecularly Engineered Mat, Notre Dame, IN 46556 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2005年 / 76卷 / 06期

关键词：

D O I：

10.1063/1.1921552

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The design of a plasma sputtering system for the deposition of combinatorial libraries is described. A rotating carousel is used to position shadow masks between the targets and the substrate. Multilayer films are built up by depositing sequentially through various masks. Postdeposition annealing is used to promote interdiffusion of the layered structures. Either discrete or compositional gradient libraries can be deposited in this system. Samples appropriate for characterization with a scanning electrochemical microscope or a multichannel microelectrode array system can be produced. The properties of some deposited Pt-Ru films for fuel cell applications are described. (c) 2005 American Institute of Physics.

引用

收藏

页数：7

相关论文

共 19 条

[1] Microstructure and microstructural evolution in BaTiO3 films fabricated using the precursor method [J].

Bendersky, LA ;

Lu, CJ ;

Scott, JH ;

Chang, K ;

Takeuchi, I .

JOURNAL OF MATERIALS RESEARCH, 2002, 17 (10) :2499-2506

[2] Materials science - Rapid alloy assessment [J].

Cahn, RW .

NATURE, 2001, 410 (6829) :643-644

[3] A low-loss composition region identified from a thin-film composition spread of (Ba1-x-ySrxCay) TiO3 [J].

Chang, H ;

Takeuchi, I ;

Xiang, XD .

APPLIED PHYSICS LETTERS, 1999, 74 (08) :1165-1167

[4] Economical sputtering system to produce large-size composition-spread libraries having linear and orthogonal stoichiometry variations [J].

Dahn, JR ;

Trussler, S ;

Hatchard, TD ;

Bonakdarpour, A ;

Mueller-Neuhaus, JR ;

Hewitt, KC ;

Fleischauer, M .

CHEMISTRY OF MATERIALS, 2002, 14 (08) :3519-3523

[5] Microstructural characterization of Ti-TiN/CNx gradient-multilayered coatings [J].

Fernández-Ramos, C ;

Sánchez-López, JC ;

Justo, A ;

Rojas, TC ;

Papst, I ;

Hofer, F ;

Fernández, A .

SURFACE & COATINGS TECHNOLOGY, 2004, 180 :526-532

[6] DEPOSITION SYSTEM FOR THE SYNTHESIS OF MODULATED, ULTRATHIN-FILM COMPOSITES [J].

FISTER, L ;

LI, XM ;

MCCONNELL, J ;

NOVET, T ;

JOHNSON, DC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (06) :3014-3019

[7] LEIS AND AES ON SPUTTERED AND ANNEALED POLYCRYSTALLINE PT-RU BULK ALLOYS [J].

GASTEIGER, HA ;

ROSS, PN ;

CAIRNS, EJ .

SURFACE SCIENCE, 1993, 293 (1-2) :67-80

[8] MULTIPLE-SAMPLE-CONCEPT IN MATERIALS RESEARCH - SYNTHESIS, COMPOSITIONAL ANALYSIS AND TESTING OF ENTIRE MULTICOMPONENT SYSTEMS [J].

HANAK, JJ .

JOURNAL OF MATERIALS SCIENCE, 1970, 5 (11) :964-&

[9] Controlled synthesis of new compounds using modulated elemental reactants [J].

Johnson, DC .

CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE, 1998, 3 (02) :159-167

[10] Combinatorial laser molecular beam epitaxy (MBE) growth of Mg-Zn-O alloy for band gap engineering [J].

Matsumoto, Y ;

Murakami, M ;

Jin, ZW ;

Ohtomo, A ;

Lippmaa, M ;

Kawasaki, M ;

Koinuma, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (6AB) :L603-L605