Influence of the substrate temperature during deposition on film characteristics of copper phthalocyanine and field-effect transistor properties

被引:114
作者
Xiao, K [1 ]
Liu, Y [1 ]
Yu, G [1 ]
Zhu, D [1 ]
机构
[1] Chinese Acad Sci, Inst Chem, Ctr Mol Sci, Beijing 100080, Peoples R China
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 77卷 / 3-4期
关键词
D O I
10.1007/s00339-003-2169-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper, we employ different substrate temperatures during the deposition process and observe a highly ordered structure and strong orientation of copper phthalocyanine (CuPc) molecules on Si/SiO2 by using X-ray-diffraction and transmission electron microscopy analysis. The results show the effect of CuPc morphology at different substrate temperatures on the organic field-effect-transistor performance. When the substrate temperature for deposition of CuPc is 120 degreesC, a mobility of 3.75x10(-3) cm(2)/V s can be obtained.
引用
收藏
页码:367 / 370
页数:4
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