Nucleation and growth of Si nanowires from silicon oxide

被引:328
作者
Wang, N [1 ]
Tang, YH [1 ]
Zhang, YF [1 ]
Lee, CS [1 ]
Lee, ST [1 ]
机构
[1] City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, Hong Kong, Peoples R China
关键词
D O I
10.1103/PhysRevB.58.R16024
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nucleation and growth of Si nanowires by laser ablation and thermal evaporation of Si powder sources mixed with SiO2 have been investigated by means of transmission electron microscopy. At the initial nucleation stage, Si oxide vapor condensed on the substrate and formed Si nanoparticles (the nuclei of nanowires). Each Si nanowire nucleus consisted of a polycrystalline Si core containing a high density of defects and a Si oxide shell. A growth mechanism was proposed based on the microstructure and different morphologies of the Si nanowires observed. [S0163-1829(98)51348-3].
引用
收藏
页码:16024 / 16026
页数:3
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