X-ray scattering from misfit dislocations in heteroepitaxial films:: The case of Nb(110) on Al2O3

被引:26
作者
Barabash, RI [1 ]
Donner, W
Dosch, H
机构
[1] Max Planck Inst Met Forsch, D-70569 Stuttgart, Germany
[2] Univ Stuttgart, Inst Theoret & Angew Phys, D-70569 Stuttgart, Germany
[3] Natl Tech Univ Ukraine, Kiev Polytech Inst, UA-252056 Kiev, Ukraine
关键词
D O I
10.1063/1.1342215
中图分类号
O59 [应用物理学];
学科分类号
摘要
We apply the Krivoglaz theory of x-ray scattering to thin epitaxial films containing misfit dislocations and reanalyze the seemingly puzzling x-ray scattering phenomena observed in several heteroepitaxial films. We show that the two-line shape scattering distribution and its dependence upon film thickness and momentum transfer can be understood in natural way and on a quantitative level. Extended diffuse x-ray scattering maps have been obtained from Nb(110)/Al2O3(11 (2) over bar0) which are discussed within the framework of this theory disclose a particular dislocation network at the Nb-Al2O3 interface. (C) 2001 American Institute of Physics.
引用
收藏
页码:443 / 445
页数:3
相关论文
共 12 条
[1]   Atomic structure of epitaxial Nb-Al2O3 interfaces .2. Misfit dislocations [J].
Gutekunst, G ;
Mayer, J ;
Vitek, V ;
Ruhle, M .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1997, 75 (05) :1357-1382
[2]  
Hirth J. P., 1968, Theory of Dislocations
[3]   Titanium thin film growth on small and large misfit substrates [J].
Huth, M ;
Flynn, CP .
APPLIED PHYSICS LETTERS, 1997, 71 (17) :2466-2468
[4]   X-ray diffraction peaks due to misfit dislocations in heteroepitaxial structures [J].
Kaganer, VM ;
Kohler, R ;
Schmidbauer, M ;
Opitz, R ;
Jenichen, B .
PHYSICAL REVIEW B, 1997, 55 (03) :1793-1810
[5]  
Krivoglaz M.A:, 1996, DIFFUSE SCATTERING X
[6]  
Landau L. D., 1959, THEORY ELASTICITY
[7]   Specular and diffuse reflectivity from thin films containing misfit dislocations [J].
Miceli, PF ;
Weatherwax, J ;
Krentsel, T ;
Palmstrom, CJ .
PHYSICA B, 1996, 221 (1-4) :230-234
[8]   X-RAY-SCATTERING FROM ROTATIONAL DISORDER IN EPITAXIAL-FILMS - AN UNCONVENTIONAL MOSAIC CRYSTAL [J].
MICELI, PF ;
PALMSTROM, CJ .
PHYSICAL REVIEW B, 1995, 51 (08) :5506-5509
[9]   EXTRAORDINARY ALIGNMENT OF NB-FILMS WITH SAPPHIRE AND THE EFFECTS OF ADDED HYDROGEN [J].
REIMER, PM ;
ZABEL, H ;
FLYNN, CP ;
DURA, JA .
PHYSICAL REVIEW B, 1992, 45 (19) :11426-11429
[10]  
Warren B.E., 1990, X-ray Diffraction