Optimised cantilever biosensor with piezoresistive read-out

被引：132

作者：

Rasmussen, PA

Thaysen, J

Hansen, O

Eriksen, SC

Boisen, A

机构：

[1] Tech Univ Denmark, Mikroelekt Centret MIC, DK-2800 Lyngby, Denmark

[2] Cant AS, Orsteds Plads, DK-2800 Lyngby, Denmark

来源：

ULTRAMICROSCOPY | 2003年 / 97卷 / 1-4期

关键词：

cantilever; piezoresistive read-out; silicide; surface stress;

D O I：

10.1016/S0304-3991(03)00063-9

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited for operation in liquids. The wiring is titanium silicide which-in contrast to conventional metal wiring-is compatible with the high-temperature LPCVD coating process. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：371 / 376

页数：6

共 9 条

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