Detection of pH variation using modified microcantilever sensors

被引：75

作者：

Ji, HF ^{[1
]}

Hansen, KM ^{[1
]}

Hu, Z ^{[1
]}

Thundat, T ^{[1
]}

机构：

[1] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 72卷 / 03期

关键词：

microcantilevers; pH; surface stress; microcantilever bending;

D O I：

10.1016/S0925-4005(00)00678-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A micromechanical technique for measuring solution pH using modified silicon (SiO2) and silicon nitride (Si3N4) microcantilevers is described. As the modified surface of the cantilever accumulates charge proportional to the pH of the surrounding liquid, the cantilever undergoes bending due to the differential surface stress. Results are presented for chemically modified (4-aminobutyltriethoxysilane, 11-mercaptoundecanoic acid) and metal-modified (Au/Al) surfaces over a pH range 2-12. Aminosilane-modified SiO2/Au cantilevers performed robustly over pH range 2-8 (49 nm deflection/pH unit), while Si3N4/Au cantilevers performed well st pH 2-6 and 8-12 (30 nm deflection/pH unit). The influences of other ions on cantilever bending were found to be negligible below 10(-2) M concentration. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：233 / 238

页数：6

共 21 条

[1] FORMATION OF MONOLAYER FILMS BY THE SPONTANEOUS ASSEMBLY OF ORGANIC THIOLS FROM SOLUTION ONTO GOLD [J].