Nonvolatile memory effects in nitrogen doped tetrahedral amorphous carbon thin films

被引:35
作者
Gerstner, EG [1 ]
McKenzie, DR [1 ]
机构
[1] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia
关键词
D O I
10.1063/1.368824
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electrical measurements of nitrogen doped tetrahedral amorphous carbon (ta-C:N) thin films have revealed a reversible nonvolatile memory effect, related to the excitation and de-excitation of electrons between deep acceptor states and shallow donor states within the mobility gap. This effect is characterized by changes in the small signal film conductivity of up to 10 times, and has been used to fabricate 1-bit memory cells with effective memory retention times in the order of several months. (C) 1998 American Institute of Physics. [S0021-8979(98)05522-4].
引用
收藏
页码:5647 / 5651
页数:5
相关论文
共 15 条
[1]   AMORPHOUS DIAMOND-SI SEMICONDUCTOR HETEROJUNCTIONS [J].
AMARATUNGA, GAJ ;
SEGAL, DE ;
MCKENZIE, DR .
APPLIED PHYSICS LETTERS, 1991, 59 (01) :69-71
[2]  
AMARATUNGA GAJ, 1993, 2 INT C APPL DIAMOND
[3]  
GERSTNER EG, IN PRESS DIAMOND REL
[5]   POOLE-FRENKEL CONDUCTION IN AMORPHOUS SOLIDS [J].
HILL, RM .
PHILOSOPHICAL MAGAZINE, 1971, 23 (181) :59-&
[6]  
KREYNINA GS, 1962, RADIO ENG ELEC PHYS, V7, P1949
[7]  
Maes H. E., 1989, Microelectronics Journal, V20, P9, DOI 10.1016/0026-2692(89)90122-5
[8]   PROPERTIES OF TETRAHEDRAL AMORPHOUS-CARBON PREPARED BY VACUUM-ARC DEPOSITION [J].
MCKENZIE, DR ;
MULLER, D ;
PAILTHORPE, BA ;
WANG, ZH ;
KRAVTCHINSKAIA, E ;
SEGAL, D ;
LUKINS, PB ;
SWIFT, PD ;
MARTIN, PJ ;
AMARATUNGA, G ;
GASKELL, PH ;
SAEED, A .
DIAMOND AND RELATED MATERIALS, 1991, 1 (01) :51-59
[9]   COMPRESSIVE-STRESS-INDUCED FORMATION OF THIN-FILM TETRAHEDRAL AMORPHOUS-CARBON [J].
MCKENZIE, DR ;
MULLER, D ;
PAILTHORPE, BA .
PHYSICAL REVIEW LETTERS, 1991, 67 (06) :773-776
[10]   Tetrahedral bonding in amorphous carbon [J].
McKenzie, DR .
REPORTS ON PROGRESS IN PHYSICS, 1996, 59 (12) :1611-1664