Nanoscale investigation of optical and electrical properties by dynamic-mode atomic force microscopy using a piezoelectric cantilever

被引：18

作者：

Satoh, N ^{[1
]}

Kobayashi, K

Watanabe, S

Fujii, T

Horiuchi, T

Yamada, H

Matsushige, K

机构：

[1] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6068501, Japan

[2] Kyoto Univ, Int Innovat Ctr, Kyoto 6068501, Japan

[3] Nikon Inc, Sagamihara, Kanagawa 2280828, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2003年 / 42卷 / 7B期

关键词：

piezoelectric cantilever; SNOM; KFM; FM detection;

D O I：

10.1143/JJAP.42.4878

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrated a novel application of a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor for a dynamic-mode atomic force microscope (AFM) combined with a scanning nearfield optical microscope (SNOM). This experimental setup was also applied to a Kelvin-probe force microscope (KFM) for the investigation of local electrical properties. A frequency modulation (FM) detection method was used for enhancing the detection sensitivity of electrostatic forces between a probe tip and a sample. Local optical properties of a PbTiO3 single crystal were investigated using the conductive PZT cantilever as an AFM/SNOM probe. Furthermore, studies on local optical and electrical properties of ferroelectric copolymer films were also presented.

引用

页码：4878 / 4881

页数：4

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