Characteristics of spray pyrolytic ZnO thin films

被引：35

作者：

Lee, CH

Lin, LY

机构：

[1] Grad. Sch. of Mat. Sci. and Eng., Cheng Kung University, Tainan

来源：

APPLIED SURFACE SCIENCE | 1996年 / 92卷

关键词：

D O I：

10.1016/0169-4332(95)00223-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

This paper discusses the characteristics of spray pyrolytic ZnO thin films, which include the morphology, microstructure, resistivity and transmittance. The oscillation nature of resistivity versus growth temperature is analyzed in terms of phase change in microstructure. The effect of Al and S doping is also investigated.

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收藏

页码：163 / 166

页数：4

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