HIGHLY CONDUCTIVE AND TRANSPARENT ZNO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING IN AN APPLIED EXTERNAL DC MAGNETIC-FIELD

被引：123

作者：

MINAMI, T

NANTO, H

TAKATA, S

机构：

来源：

THIN SOLID FILMS | 1985年 / 124卷 / 01期

关键词：

D O I：

10.1016/0040-6090(85)90026-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：43 / 47

页数：5

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[7] TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF REACTIVE MAGNETRON SPUTTERING
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