HIGHLY CONDUCTIVE AND TRANSPARENT ZINC-OXIDE FILMS PREPARED BY RF MAGNETRON SPUTTERING UNDER AN APPLIED EXTERNAL MAGNETIC-FIELD

被引：190

作者：

MINAMI, T

NANTO, H

TAKATA, S

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 41卷 / 10期

关键词：

D O I：

10.1063/1.93355

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：958 / 960

页数：3

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[7] TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF REACTIVE MAGNETRON SPUTTERING
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[J]. APPLIED PHYSICS LETTERS, 1981, 39 (08) : 640 - 642