A REAL-TIME ELLIPSOMETRY STUDY OF THE GROWTH OF AMORPHOUS-SILICON ON TRANSPARENT CONDUCTING OXIDES

被引：59

作者：

KUMAR, S

DREVILLON, B

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 08期

关键词：

D O I：

10.1063/1.342694

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：3023 / 3034

页数：12

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