Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm

被引:152
作者
Schubert, Martin F. [1 ]
Mont, Frank W. [1 ]
Chhajed, Sameer [1 ]
Poxson, David J. [2 ]
Kim, Jong Kyu [1 ]
Schubert, E. Fred [1 ,2 ]
机构
[1] Rensselaer Polytech Inst, Future Chips Constellat, Dept Elect Comp & Syst Engn, Troy, NY 12180 USA
[2] Rensselaer Polytech Inst, Dept Phys Appl Phys & Astron, Troy, NY 12180 USA
关键词
D O I
10.1364/OE.16.005290
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Designs of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials are optimized using a genetic algorithm. Co-sputtered and low-refractive-index materials allow the fine-tuning of refractive index, which is required to achieve optimum antireflection characteristics. The algorithm minimizes reflection over a wide range of wavelengths and incident angles, and includes material dispersion. Designs of antireflection coatings for silicon-based image sensors and solar cells, as well as triple-junction GaInP/GaAs/Ge solar cells are presented, and are shown to have significant performance advantages over conventional coatings. Nano-porous low-refractive-index layers are found to comprise generally half of the layers in an optimized antireflection coating, which underscores the importance of nano-porous layers for high-performance broadband and omnidirectional antireflection coatings. (C) 2008 Optical Society of America.
引用
收藏
页码:5290 / 5298
页数:9
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