Thermal annealing effects on an InGaN film with an average indium mole fraction of 0.31

被引:27
作者
Feng, SW
Lin, EC
Tang, TY
Cheng, YC
Wang, HC
Yang, CC
Ma, KJ
Shen, CH
Chen, LC
Kim, KH
Lin, JY
Jiang, HX
机构
[1] Natl Taiwan Univ, Grad Inst Electroopt Engn, Dept Elect Engn, Taipei 10764, Taiwan
[2] Natl Taiwan Univ, Grad Inst Elect Engn, Taipei 10764, Taiwan
[3] Chung Hua Univ, Dept Mech Engn, Hsinchu, Taiwan
[4] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 10764, Taiwan
[5] Kansas State Univ, Dept Phys, Manhattan, KS 66506 USA
关键词
D O I
10.1063/1.1625434
中图分类号
O59 [应用物理学];
学科分类号
摘要
We compared the optical and material properties of an InGaN thin film with an average indium content at 0.31 between as-grown and postgrowth thermally annealed conditions. The major part of the photoluminescence spectrum was shifted from the original yellow band into the blue range upon thermal annealing. Cathodoluminescence (CL) spectra showed that the spectral shift occurred essentially in a shallow layer of the InGaN film. The deeper layer in the as-grown sample contributed blue emission because it had been thermally annealed during the growth of the shallow layer. The spectral change was attributed to the general trends of cluster size reduction and possibly quantum-confined Stark effect relaxation upon thermal annealing. The attribution was supported by the observations in the CL, x-ray diffraction, and high-resolution transmission electron microscopy results. (C) 2003 American Institute of Physics.
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收藏
页码:3906 / 3908
页数:3
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