Preparation of InAs by annealing of two-layer In-As electrodeposits

被引:10
作者
Kozlov, VM
Bozzini, B
Bicelli, LP
机构
[1] Univ Lecce, INFM, Dipartimento Ingn Innovaz, I-73100 Lecce, Italy
[2] CNR, Ctr Studio Proc Elettrod, Mat & Ingn Chim Giulio Natta Politecn, Dipartimento Chim Mat & Ingn Chim, I-20131 Milan, Italy
关键词
amorphous materials; semiconductors; thin films; electrochemical synthesis; x-ray diffraction;
D O I
10.1016/S0925-8388(03)00743-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this work, we investigate the galvanostatic electrodeposition of In from aqueous solutions on electrodeposited amorphous arsenic substrates and the temporal variation of the composition of the In-As two-layer subjected to annealing. Surface morphology, composition and crystallographic structure of the deposits before and after annealing were analysed by scanning electron microscopy (SEM), laser profilometry, X-ray energy dispersive spectroscopy (EDX) and X-ray diffraction (XRD). The amorphous arsenic film was structurally characterised, determining the radial distribution function (RDF) and the main interatomic distances. The annealing procedure consisted in holding the samples in vacuo at 60, 100 and 140 degreesC for increasing times. The results showed the formation of InAs, owing to reaction-diffusion going on at the In-As interface. The values of the In diffusion coefficient in the range 60-140degreesC (from 4 x 10(-21) to 2.2 x 10(-18) m(2) s(-1)) were evaluated from XRD data with a simple reaction-diffusion model. The activation energy (90 kJ mol(-1)) and the pre-exponential factor (4.5 x 10(-7) m(2) s(-1)) were also estimated. The results were discussed in connection with those previously obtained regarding the indium diffusion process into amorphous antimony with formation of InSb. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:152 / 160
页数:9
相关论文
共 33 条
[1]  
*ASTM, 1974, 50642 ASTM
[2]   INVESTIGATION OF LOCAL ORDER IN AMORPHOUS ARSENIC BY MEANS OF NEUTRON-DIFFRACTION [J].
BELLISSENT, R ;
TOURAND, G .
JOURNAL DE PHYSIQUE, 1976, 37 (12) :1423-1426
[3]   STUDIES IN HYDROGEN OVERPOTENTIAL - THE EFFECT OF CATALYTIC POISONS AT PLATINIZED PLATINUM AND NICKEL [J].
BOCKRIS, JOM ;
CONWAY, BE .
TRANSACTIONS OF THE FARADAY SOCIETY, 1949, 45 (11) :989-999
[4]  
Breitling G., 1972, Journal of Non-Crystalline Solids, V8-10, P395, DOI 10.1016/0022-3093(72)90166-4
[5]   INTERMETALLIC COMPOUNDS FORMED BY ELECTRODEPOSITION OF INDIUM ON BISMUTH [J].
CANEGALLO, S ;
DEMENEOPOULOS, V ;
BICELLI, LP ;
SERRAVALLE, G .
JOURNAL OF ALLOYS AND COMPOUNDS, 1994, 216 (01) :149-154
[6]   Indium diffusion inside InBi during and after electrodeposition at various temperatures [J].
Canegallo, S ;
Agrigento, V ;
Moraitou, C ;
Toussimi, A ;
Bicelli, LP .
JOURNAL OF ALLOYS AND COMPOUNDS, 1996, 234 (02) :211-217
[7]   MECHANISM OF INDIUM ELECTRODEPOSITION ON BISMUTH CATHODES AND TIME EVOLUTION OF THE DEPOSITS [J].
CANEGALLO, S ;
DEMENEOPOULOS, V ;
BICELLI, LP ;
SERRAVALLE, G .
JOURNAL OF ALLOYS AND COMPOUNDS, 1995, 228 (01) :23-30
[8]  
COULSON CA, 1961, VALENCE, P139
[9]   Electrodeposition of In+As thin film alloys and their conversion to InAsxP1-x by PH3 treatment [J].
Dalchiele, E ;
Cattarin, S ;
Musiani, M ;
Casellato, U ;
Guerriero, P ;
Rossetto, G .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1996, 418 (1-2) :83-89
[10]  
DAVIS EA, 1977, P S STRUCT NONCR MAT, P205