Indium-doped molybdenum oxide as a new p-type transparent conductive oxide

被引:51
作者
Chen, Han-Yi [1 ]
Su, Huan-Chieh [2 ]
Chen, Chia-Hsiang [2 ]
Liu, Kuo-Liang [2 ]
Tsai, Chung-Min [2 ]
Yen, Shiang-Jie [2 ]
Yew, Tri-Rung [1 ,2 ]
机构
[1] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu 30013, Taiwan
[2] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan
关键词
THIN-FILMS; SEMICONDUCTOR; GROWTH;
D O I
10.1039/c0jm03815f
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
New p-type transparent conductive oxide materials, MoO3: In single crystal nanowires and amorphous films, are synthesized in this work. Both nanowires and amorphous films exhibit high optical transmittance, 80-88% for 80 nm thick films at 400-800 nm wavelength, and low resistivity (down to 5.98 x 10(-4) U cm) suitable for photovoltaic device applications. The amorphous films are also deposited on flexible polyimide substrates and exhibit excellent electrical properties even after bending. Besides, p-MoO3:In/i-ZnO/n-AZO devices are fabricated to demonstrate the potential for all-transparent flexible electronic applications.
引用
收藏
页码:5745 / 5752
页数:8
相关论文
共 36 条
[21]   Optoelectronic properties of transparent p-type semiconductor CuxS thin films [J].
Parreira, P. ;
Lavareda, G. ;
Valente, J. ;
Nunes, F. T. ;
Amaral, A. ;
Nunes de Carvalho, C. .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2010, 207 (07) :1652-1654
[22]   Combinatorial studies of Zn-Al-O and Zn-Sn-O transparent conducting oxide thin films [J].
Perkins, JD ;
del Cueto, JA ;
Alleman, JL ;
Warmsingh, C ;
Keyes, BM ;
Gedvilas, LM ;
Parilla, PA ;
To, B ;
Readey, DW ;
Ginley, DS .
THIN SOLID FILMS, 2002, 411 (01) :152-160
[23]   Preparation and characterization of sol-gel derived copper-strontium-oxide thin films [J].
Roy, B. ;
Perkins, J. D. ;
Kaydanova, T. ;
Young, D. L. ;
Taylor, M. ;
Miedaner, A. ;
Curtis, C. ;
Kleebe, H. -J. ;
Readey, D. W. ;
Ginley, D. S. .
THIN SOLID FILMS, 2008, 516 (12) :4093-4101
[24]   TRANSPARENT CONDUCTING P-TYPE NIO THIN-FILMS PREPARED BY MAGNETRON SPUTTERING [J].
SATO, H ;
MINAMI, T ;
TAKATA, S ;
YAMADA, T .
THIN SOLID FILMS, 1993, 236 (1-2) :27-31
[25]   (Cu2S2)(Sr3SC2O5)-A Layered, Direct Band Gap, p-Type Transparent Conducting Oxychalcogenide: A Theoretical Analysis. [J].
Scanlon, David O. ;
Watson, Graeme W. .
CHEMISTRY OF MATERIALS, 2009, 21 (22) :5435-5442
[26]   Synthesis of P-type transparent conducting silver:indium oxide (AIO) thin films by reactive electron beam evaporation technique [J].
Subrahmanyam, A ;
Barik, UK .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2005, 66 (05) :817-822
[27]   Effects of oxygen contents on the electrical and optical properties of indium molybdenum oxide films fabricated by high density plasma-evaporation [J].
Sun, SY ;
Huang, JL ;
Lii, DF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (04) :1235-1241
[28]   A simple method for the preparation of transparent p-type Ca-doped CuInO2 films:: Pulsed-laser deposition from air-sintered Ca-doped Cu2In2O5 targets [J].
Teplin, CW ;
Kaydanova, T ;
Young, DL ;
Perkins, JD ;
Ginley, DS ;
Ode, A ;
Readey, DW .
APPLIED PHYSICS LETTERS, 2004, 85 (17) :3789-3791
[29]   A Hybrid Inorganic-Organic Semiconductor Light-Emitting Diode Using ZrO2 as an Electron-Injection Layer [J].
Tokmoldin, Nurlan ;
Griffiths, Nicholas ;
Bradley, Donal D. C. ;
Haque, Saif A. .
ADVANCED MATERIALS, 2009, 21 (34) :3475-+
[30]   Epitaxial growth of transparent p-type conducting CuGaO2 thin films on sapphire (001) substrates by pulsed laser deposition [J].
Ueda, K ;
Hase, T ;
Yanagi, H ;
Kawazoe, H ;
Hosono, H ;
Ohta, H ;
Orita, M ;
Hirano, M .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (03) :1790-1793