Extended resolution for lateral structuring with laser interference gratings using high-index input coupling

被引：16

作者：

Kelly, MK

Dahlheimer, B

机构：

[1] Walter Schottky Institut, Techn. Universität München, D-85748 Garching, Am Coulombwall

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1996年 / 156卷 / 02期

关键词：

D O I：

10.1002/pssa.2211560231

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：K13 / K16

页数：4

共 7 条

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