Pattern formation induced by Ar+ sputtering on Au(111)

被引：7

作者：

Bose, AC ^{[1
]}

Yoshitake, M ^{[1
]}

机构：

[1] NIMS, Nanomat Lab, Tsukuba, Ibaraki 3050003, Japan

来源：

APPLIED SURFACE SCIENCE | 2005年 / 241卷 / 1-2期

关键词：

scanning tunneling microscopy; surface morphology; sputtering; surface diffusion;

D O I：

10.1016/j.apsusc.2004.09.057

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Ion sputtering is employed to produce structures on the nanometer scale. The surface morphology of Au(111) after sputtering with 500 eV At+ ions at various sputtering temperatures (from room temperature (RT) to 150 degreesC with variation of 25degreesC has been investigated by scanning tunneling microscopy (STM). It is shown that the sputtering temperature can be used to determine the final surface morphology. At all sputtering temperatures, the surface is characterized by random distribution of pits. The shape and size are briefly discussed. The obtained surface morphology is explained with diffusion processes at various sputtering temperatures. The final surface morphology is the result of the diffusion processes. (C) 2004 Published by Elsevier B.V.

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收藏

页码：174 / 178

页数：5

相关论文

共 16 条

[1] Dynamics of vacancy island coalescence on Ag(111) [J].

Esser, M ;

Morgenstern, K ;

Rosenfeld, G ;

Comsa, G .

SURFACE SCIENCE, 1998, 402 (1-3) :341-345

[2] STM STUDY OF THE NUCLEATION AND ANNEALING OF ION-BOMBARDMENT INDUCED DEFECTS ON CU(100) [J].

GIRARD, JC ;

SAMSON, Y ;

GAUTHIER, S ;

ROUSSET, S ;

KLEIN, J .

SURFACE SCIENCE, 1994, 302 (1-2) :73-80

[3] Roughening of Au(111) surfaces during ion beam erosion: A Scanning Tunneling Microscope and X-ray diffraction study [J].

Judy, A ;

Murty, MVR ;

Butler, E ;

Pomeroy, J ;

Cooper, BH ;

Woll, AR ;

Brock, JD ;

Kycia, S ;

Headrick, RL .

EPITAXIAL GROWTH-PRINCIPLES AND APPLICATIONS, 1999, 570 :61-66

[4] Temperature dependent morphological evolution of Pt(111) by ion erosion: destabilization, phase coexistence and coarsening [J].

Kalff, M ;

Comsa, G ;

Michely, T .

SURFACE SCIENCE, 2001, 486 (1-2) :103-135

[5] THE SCANNING TUNNELING MICROSCOPE AS A MEANS FOR THE INVESTIGATION OF ION-BOMBARDMENT EFFECTS ON METAL-SURFACES [J].

MICHELY, T ;

COMSA, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 82 (02) :207-219

[6] GENERATION AND NUCLEATION OF ADATOMS DURING ION-BOMBARDMENT OF PT(111) [J].

MICHELY, T ;

COMSA, G .

PHYSICAL REVIEW B, 1991, 44 (15) :8411-8414

[7] Coarsening mechanisms in surface morphological evolution [J].

Michely, T ;

Kalff, M ;

Comsa, G ;

Strobel, M ;

Heinig, KH .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2002, 14 (16) :4177-4185

[8] MORPHOLOGICAL EFFECTS INDUCED BY THE FORMATION OF A PT-ADATOM LATTICE GAS ON PT(111) [J].

MICHELY, T ;

LAND, T ;

LITTMARK, U ;

COMSA, G .

SURFACE SCIENCE, 1992, 272 (1-3) :204-210

[9] TEMPERATURE-DEPENDENCE OF THE SPUTTERING MORPHOLOGY OF PT(111) [J].

MICHELY, T ;

COMSA, G .

SURFACE SCIENCE, 1991, 256 (03) :217-226

[10]

MICHELY T, 1990, SURF SCI, V230, P135