Plasma polymerization of fluorinated monomers on mesoporous silica membranes and application to gas permeation

被引:24
作者
Doucoure, A [1 ]
Guizard, C [1 ]
Durand, J [1 ]
Berjoan, R [1 ]
Cot, L [1 ]
机构
[1] IMP,F-66120 FONT ROMEU,FRANCE
关键词
plasma polymerization; fluorinated monomer; plasma-treated silica membranes; gas permeation; molecular sieve model;
D O I
10.1016/0376-7388(96)00052-X
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
Gas permeation membranes were prepared by exposing multilayered ceramic substrates to low temperature plasmas of C4F8, CHF3; and CF3-CH2F in the presence of argon as carrier gas. Permeation rates for CO2, N-2 and He were measured and ideal selectivities were calculated from the permeability ratios. The chemical structure of plasma films was investigated by XPS analysis and transmission infrared spectroscopy. Structural analysis was completed with deposition rate, critical thickness and density measurements to determine the crosslinking degree of PPFM films (plasma polymerized fluorinated monomers). Correlations between physicochemical properties and gas permselectivities afforded the opportunity of characterizing the gas permeation process through plasma-treated silica membranes.
引用
收藏
页码:143 / 150
页数:8
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