共 12 条
[1]
Raman thermometry of polysilicon microelectromechanical systems in the presence of an evolving stress
[J].
JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME,
2007, 129 (03)
:329-334
[3]
RESONANCE RAMAN-SCATTERING IN SI AT ELEVATED-TEMPERATURES
[J].
PHYSICAL REVIEW B,
1984, 29 (02)
:793-801
[4]
DeWolf I, 1996, SEMICOND SCI TECH, V11, P139, DOI 10.1088/0268-1242/11/2/001
[7]
TEMPERATURE DEPENDENCE OF RAMAN SCATTERING IN SILICON
[J].
PHYSICAL REVIEW B-SOLID STATE,
1970, 1 (02)
:638-&