Artificial sensory hairs based on the flow sensitive receptor hairs of crickets

被引：114

作者：

Dijkstra, M ^{[1
]}

van Baar, JJ ^{[1
]}

Wiegerink, RJ ^{[1
]}

Lammerink, TSJ ^{[1
]}

de Boer, JH ^{[1
]}

Krijnen, GJM ^{[1
]}

机构：

[1] Univ Twente, MESA Res Inst, Transducers Sci & Technol Grp, NL-7500 AE Enschede, Netherlands

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2005年 / 15卷 / 07期

关键词：

D O I：

10.1088/0960-1317/15/7/019

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the modelling, design, fabrication and characterization of flow sensors based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to drag-forces exerted on the hair shaft. Artificial sensory hairs have been realized in SU-8 on suspended SixNy membranes. The movement of the membranes is detected capacitively. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept.

引用

页码：S132 / S138

页数：7

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