Two-polymer microtransfer molding for highly layered microstructures

被引:42
作者
Lee, JH [1 ]
Kim, CH
Ho, KM
Constant, K
机构
[1] Iowa State Univ Sci & Technol, Dept Phys & Astron, Ames Lab, US DOE, Ames, IA 50011 USA
[2] Iowa State Univ Sci & Technol, Dept Mat Sci & Engn, Ames, IA 50011 USA
关键词
D O I
10.1002/adma.200500721
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Two-polymer microtransfer molding (2P-mu TM), an advanced microtransfer molding technique, is developed for fabrication of 3D microstructures. The use of two different photocurable prepolymers and a simple and robust filling and coating method allows an extremely high yield in layer-by-layer microfabrication able to produce highly layered microstructures with high structural fidelity (see Figure).
引用
收藏
页码:2481 / +
页数:6
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