Determination of the mechanical properties of microstructures

被引：31

作者：

Ye, XY ^{[1
]}

Zhou, ZY ^{[1
]}

Yang, Y ^{[1
]}

Zhang, JH ^{[1
]}

Yao, J ^{[1
]}

机构：

[1] TSING HUA UNIV,DEPT PRECIS INSTRUMENTS & MECHANOL,BEIJING 100084,PEOPLES R CHINA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期

关键词：

microstructure; mechanical properties; Young's modulus; residual stress; fatigue property; resonance frequency;

D O I：

10.1016/S0924-4247(97)80051-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel resonance method for the determination of Young's modulus, the residual stress and the fatigue property of thin silicon plates is described. Young's modulus E and the residual stress sigma are determined respectively by measuring the resonance frequencies of cantilever plates and plates with two opposite edges clamped and the other two edges free. Th fatigue property is tested by measuring variations of the frequency and vibration amplitude of resonance of a cantilever plate after it has been resonating for a long time. With (100)-plane [110]-direction single-crystal silicon thin plates, the measured value for E/(1 - v(2)) is 128 +/- 18 GPa and for the residual stress a is 74.7 MPa. Fatigue is not clearly observed after 21 days of resonating.

引用

页码：750 / 754

页数：5

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