Measurement of the band offsets between amorphous LaAlO3 and silicon

被引:158
作者
Edge, LF [1 ]
Schlom, DG
Chambers, SA
Cicerrella, E
Freeouf, JL
Holländer, B
Schubert, J
机构
[1] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA
[2] Pacific NW Natl Lab, Fundamental Sci Directorate, Richland, WA 99352 USA
[3] Oregon Hlth & Sci Univ, Dept Elect & Comp Engn, Beaverton, OR 97006 USA
[4] Forschungszentrum Julich, Inst Schichten & Grenzflachen ISGI IT, D-52425 Julich, Germany
[5] Forschungszentrum Julich, Ctr Nanoelect Syst Informat, D-52425 Julich, Germany
关键词
D O I
10.1063/1.1644055
中图分类号
O59 [应用物理学];
学科分类号
摘要
The conduction and valence band offsets between amorphous LaAlO3 and silicon have been determined from x-ray photoelectron spectroscopy measurements. These films, which are free of interfacial SiO2, were made by molecular-beam deposition. The band line-up is type I with measured band offsets of 1.8+/-0.2 eV for electrons and 3.2+/-0.1 eV for holes. The band offsets are independent of the doping concentration in the silicon substrate as well as the amorphous LaAlO3 film thickness. These amorphous LaAlO3 films have a bandgap of 6.2+/-0.1 eV. (C) 2004 American Institute of Physics.
引用
收藏
页码:726 / 728
页数:3
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