Optical investigations of the microstructure of hydrogenated amorphous carbon films

被引：23

作者：

Paret, V

Sadki, A

Bounouh, Y

Alameh, R

Naud, C

Zarrabian, M

Seignac, A

Turban, G

Theye, ML

机构：

[1] Univ Paris 06, Lab Opt Solides, UMR CNRS 7601, F-75252 Paris 05, France

[2] Inst Mat Nantes, Lab Plasmas & Couches Minces, UMR CNRS 110, F-44322 Nantes 03, France

[3] Univ Rennes 1, Lab Spect Solide & Electron Quant, F-35042 Rennes, France

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1998年 / 227卷

关键词：

amorphous carbon; optical properties; bonding configurations;

D O I：

10.1016/S0022-3093(98)00146-X

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The electronic and vibrational properties of hydrogenated amorphous carbon (a-C:H) films deposited by a dual electron cyclotron resonance-radio frequency (ECR-RF) plasma technique from methane at different negative RF substrate bias voltages have been investigated by several complementary optical methods covering a wide spectral range (0.06 to 30 eV). The results as a whole are interpreted in terms of local C/C and C/H bonding configurations and their effects on the electronic states introduced by the rr-bonded clusters. (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：583 / 587

页数：5

共 12 条

[1] INFLUENCE OF ANNEALING ON THE HYDROGEN-BONDING AND THE MICROSTRUCTURE OF DIAMOND-LIKE AND POLYMER-LIKE HYDROGENATED AMORPHOUS-CARBON FILMS [J].