INFLUENCE OF ANNEALING ON THE HYDROGEN-BONDING AND THE MICROSTRUCTURE OF DIAMOND-LIKE AND POLYMER-LIKE HYDROGENATED AMORPHOUS-CARBON FILMS

被引：92

作者：

BOUNOUH, Y

THEYE, ML

DEHBIALAOUI, A

MATTHEWS, A

STOQUERT, JP

机构：

[1] UNIV HULL,SURFACE ENGN RES CTR,KINGSTON HULL HU6 7RX,N HUMBERSIDE,ENGLAND

[2] CTR RECH NUCL,PHASE GRP,F-67037 STRASBOURG,FRANCE

来源：

PHYSICAL REVIEW B | 1995年 / 51卷 / 15期

关键词：

D O I：

10.1103/PhysRevB.51.9597

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The influence of hydrogen incorporation on the microstructure of hydrogenated amorphous carbon (a-C:H) films has been studied in detail by applying several complementary methods, i.e., elastic recoil detection analysis (ERDA), hydrogen evolution, and infrared absorption measurements, to two series of samples prepared by two different techniques, respectively representative of diamondlike and polymerlike a-C:H. The analysis of the changes of the infrared vibrational spectra over a large frequency range upon annealing at increasing temperatures up to 600°C allowed us to get insights into both the C-H and C-C bonding modifications. © 1995 The American Physical Society.

引用

页码：9597 / 9605

页数：9

共 20 条

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